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http://dx.doi.org/10.25673/4989Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Schulze, Matthias | - |
| dc.date.accessioned | 2018-09-24T16:22:49Z | - |
| dc.date.available | 2018-09-24T16:22:49Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | https://opendata.uni-halle.de//handle/1981185920/11031 | - |
| dc.identifier.uri | http://dx.doi.org/10.25673/4989 | - |
| dc.description.statementofresponsibility | von Matthias Schulze | - |
| dc.format.extent | Online-Ressource (PDF-Datei: 147 S., 5069 KB) | - |
| dc.language.iso | ger | - |
| dc.publisher | Universitätsbibliothek | - |
| dc.publisher | Otto von Guericke University Library, Magdeburg, Germany | - |
| dc.subject | Hochschulschrift | - |
| dc.title | Physikalische Vorgänge in gepulsten Magnetronentladungen | - |
| dc.title.alternative | Physical processes in pulsed magnetron discharges | - |
| dcterms.type | Hochschulschrift | - |
| dc.type | PhDThesis | - |
| dc.identifier.urn | urn:nbn:de:101:1-201010122213 | - |
| local.publisher.universityOrInstitution | Otto-von-Guericke-Universität Magdeburg | - |
| local.subject.keywords | gepulstes Magnetron-Sputtern, Sputtern, Abscheidung von Oxiden, Nitriden, gepulstes Plasma | - |
| local.openaccess | true | - |
| Appears in Collections: | Fakultät für Naturwissenschaften | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| matschulze.pdf | 5.07 MB | Adobe PDF |  View/Open |